JPH02125331U - - Google Patents

Info

Publication number
JPH02125331U
JPH02125331U JP3421989U JP3421989U JPH02125331U JP H02125331 U JPH02125331 U JP H02125331U JP 3421989 U JP3421989 U JP 3421989U JP 3421989 U JP3421989 U JP 3421989U JP H02125331 U JPH02125331 U JP H02125331U
Authority
JP
Japan
Prior art keywords
exhaust means
plasma generation
chamber
electromagnetic coil
generation chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3421989U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3421989U priority Critical patent/JPH02125331U/ja
Publication of JPH02125331U publication Critical patent/JPH02125331U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP3421989U 1989-03-24 1989-03-24 Pending JPH02125331U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3421989U JPH02125331U (en]) 1989-03-24 1989-03-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3421989U JPH02125331U (en]) 1989-03-24 1989-03-24

Publications (1)

Publication Number Publication Date
JPH02125331U true JPH02125331U (en]) 1990-10-16

Family

ID=31538498

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3421989U Pending JPH02125331U (en]) 1989-03-24 1989-03-24

Country Status (1)

Country Link
JP (1) JPH02125331U (en])

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